Dr. John W. Coburn

Profile

Academic positionEmeritus
Research fieldsProcess Engineering, Technical Chemistry,Surface Physics
KeywordsPlasma Etching, Plasma-Surface Interactions

Current contact address

CountryUnited States of America
CitySan Jose

Host during sponsorship

Prof. Dr. Hans S. RupprechtFraunhofer-Institut für Angewandte Festkörperphysik (IAF), Freiburg
Start of initial sponsorship01/07/1993

Programme(s)

1992Humboldt Research Award Programme