Prof. Dr. Wei Zhang

Profile

Academic positionFull Professor
Research fieldsElectronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
Keywordsintegrated circuit processing and technology, nano-device, atomic layer deposition, Copper metallization, Interconnection, Low Dielectric Constant Materials

Current contact address

CountryPeople's Republic of China
CityShanghai
InstitutionFudan University
InstituteDepartment of Microelectronics
Homepagehttp://me.fudan.edu.cn/faculty/personweb/zhangwei/index.htm

Host during sponsorship

Start of initial sponsorship01/06/2001

Programme(s)

2000Humboldt Research Fellowship Programme

Publications (partial selection)

2002Wei Zhang, Peng-Fei Wang, Shi-Jin Ding, Ji-Tao Wang, William Wei Lee: Effect of N2 plasma annealing on properties of fluorine doped silicon dioxide films with low dielectric constant for ultra-large-scale integrated circuits. In: Chinese Physics Letters, 2002, 875-877