Prof. Dr. Shi-Jin Ding

Profile

Academic positionFull Professor
Research fieldsElectronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering,Materials Engineering
KeywordsAtomic layer deposition (ALD) technique, Non-volatile memory technology, High-k dielectric/Metal gate stack, Low-k material and copper integration, MIM capacitors for RF and mixed signal application

Current contact address

CountryPeople's Republic of China
CityShanghai
InstitutionFudan University
InstituteDepartment of Microelectronics

Host during sponsorship

Prof. Dr. Franz FaupelLehrstuhl für Materialverbunde, Christian-Albrechts-Universität zu Kiel, Kiel
Start of initial sponsorship01/12/2001

Programme(s)

2001Humboldt Research Fellowship Programme

Publications (partial selection)

2003Shi-Jin Ding, David Wei Zhang, Ji-Tao Wang, Wei William Lee: Chemical bonding of magnetron-sputtered copper on PECVD amorphous SiCOF film . In: Applied Surface Science, 2003, 321-330
2003S.-J. Ding, V. Zaporojtchenko, J. Kruse, J. Zekonyte, F. Faupel: Investigation of the interaction of evaporated aluminum with vapor deposited Teflon AF films via X-ray photoelectron spectroscopy . In: Applied Physics A: Materials Science & Processing, 2003, 851-856