Dr. Felix Julian Schulze

Profile

Academic positionPost Doc
Research fieldsPlasma Physics
Keywordscapacitively coupled RF discharges, electrical asymmetry effect, electron heating, low temperature plasmas, separate control of ion energy and flux

Current contact address

CountryGermany
CitySprockhövel

Host during sponsorship

Dr. Zoltan DonkoInstitute for Solid State Physics and Optics, Hungarian Academy of Sciences, Budapest
Prof. Dr. Gabor VeresWigner Research Centre for Physics, Institute for Particle and Nuclear Physics, Hungarian Academy of Sciences, Budapest
Start of initial sponsorship01/05/2010

Programme(s)

2010Feodor Lynen Research Fellowship Programme for Postdocs

Publications (partial selection)

2011J. Schulze, E. Schüngel, U. Czarnetzki, and T. Mussenbrock: Making a geometrically asymmetric capacitive rf discharge electrically symmetric. In: Applied Physics Letters, 2011, 031501
2011E. Schüngel, J. Schulze, Z. Donko, and U. Czarnetzki: Power absorption in electrically asymmetric dual frequency capacitive radio frequency discharges. In: Physics of Plasmas, 2011, 013503
2011U. Czarnetzki, J. Schulze, E. Sch¨ungel, and Z. Donko: The Electrical Asymmetry Effect in capacitively coupled radio frequency discharges. In: Plasma Sources Science and Technology, 2011, 024010
2011J. Schulze, E. Schüngel, Z. Donko, and U. Czarnetzki: The Electrical Asymmetry Effect in multi-frequency capacitively coupled radio frequency discharges. In: Plasma Sources Science and Technology, 2011, 015017
2010J. Schulze, E. Schüngel, Z. Donko, and U. Czarnetzki: Charge dynamics in capacitively coupled radio frequency discharges. In: Journal of Physics D: Applied Physics, 2010, 225201
2010J. Schulze, E. Schüngel, Z. Donko, and U. Czarnetzki: Excitation dynamics in electrically asymmetric capacitively coupled radio frequency discharges: experiment, simulation, and model. In: Plasma Sources Science and Technology, 2010, 045028
2010J. Schulze, E. Schüngel, Z. Donko, D. Luggenhölscher, and U. Czarnetzki: Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges. In: Journal of Physics D: Applied Physics, 2010, 124016
2010Z. Donko, J. Schulze, P. Hartmann, I. Korolov, U. Czarnetzki, and E. Schüngel: The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges. In: Applied Physics Letters, 2010, 081501
2010D. Ziegler, J. Trieschmann, T. Mussenbrock, R. P. Brinkmann, J. Schulze, U. Czarnetzki, E. Semmler, P. Awakowicz, D. O’Connell, T. Gans: The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges. In: Plasma Sources Science and Technology, 2010, 045001
2009J. Schulze, Z. Donko, D. Luggenhölscher, and U. Czarnetzki: Different modes of electron heating in dual-frequency capacitively coupled radio frequency discharges. In: Plasma Sources Science and Technology, 2009, 034011
2009J. Schulze, E. Schüngel, U. Czarnetzki, and Z. Donko: Optimization of the Electrical Asymmetry Effect in dual-frequency capacitively coupled radio frequency discharges - Experiment, simulation, and model. In: Journal of Applied Physics, 2009, 063307
2009Z. Donko, J. Schulze, B. G. Heil, and U. Czarnetzki: PIC simulations of the separate control of ion flux and energy in CCRF discharges via the Electrical Asymmetry Effect. In: Journal of Physics D: Applied Physics, 2009, 025205
2009Z. Donko, J. Schulze, U. Czarnetzki, and D. Luggenhölscher: Self-excited non-linear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges. In: Applied Physics Letters, 2009, 131501
2009U. Czarnetzki, B. G. Heil, J. Schulze, Z. Donko, T. Mussenbrock, and R. P. Brinkmann: The Electrical Asymmetry Effect - A novel and simple method for separate control of ion energy and flux in capacitively coupled RF discharges. In: Journal of Physics: Conference Series, 2009, 012010
2009J. Schulze, E. Schüngel, and U. Czarnetzki: The Electrical Asymmetry Effect in capacitively coupled radio frequency discharges - Measurements of DC self bias, ion energy, and ion flux. In: Journal of Physics D: Applied Physics, 2009, 092005
2008J. Schulze, Z. Donko, B. G. Heil, D. Luggenhölscher, T. Mussenbrock, R. P. Brinkmann, and U. Czarnetzki: Electric Field Reversals in the sheath region of capacitively coupled radio frequency discharges at different pressures. In: Journal of Physics D: Applied Physics, 2008, 105214
2008J. Schulze, B. G. Heil, D. Luggenhölscher, T. Mussenbrock, R. P. Brinkmann, and U. Czarnetzki: Electron beams in asymmetric capacitively coupled RF discharges at low pressures. In: Journal of Physics D: Applied Physics, 2008, 042003
2008J. Schulze, B. G. Heil, D. Luggenhölscher, and U. Czarnetzki: Electron beams in capacitively coupled RF discharges. In: IEEE Transactions on Plasma Science, 2008, 1400
2008J. Schulze, D. Luggenhölscher, and U. Czarnetzki: Instabilities in capacitively coupled RF discharges. In: IEEE Transactions on Plasma Science, 2008, 1402
2008B. G. Heil, J. Schulze, T. Mussenbrock, R. P. Brinkmann, and U. Czarnetzki: Numerical Modeling of Electron Beams Accelerated by the Radio Frequency Boundary Sheath. In: IEEE Transactions on Plasma Science, 2008, 1404
2008J. Schulze, B. G. Heil, D. Luggenhölscher, R. P. Brinkmann, and U. Czarnetzki: Stochastic heating in asymmetric capacitively coupled RF discharges. In: Journal of Physics D: Applied Physics, 2008, 195212
2007J. Schulze, T. Kampschulte, D. Luggenhölscher, and U. Czarnetzki: Diagnostics of the Plasma Series Resonance effect in radio-frequency discharges. In: Journal of Physics: Conference Series, 2007, 012010
2007T. Kampschulte, J. Schulze, D. Luggenh¨olscher, M. D. Bowden, and U. Czarnetzki: Laser spectroscopic electric field measurement in krypton. In: New Journal of Physics, 2007, 18
2007J. Schulze, T. Gans, D. OConnell, U. Czarnetzki, A. R. Ellingboe, and M. M. Turner: Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge. In: Journal of Physics D: Applied Physics, 2007, 7008
2006T. Gans, J. Schulze, D. OConnell, U. Czarnetzki, R. Faulkner, A. R. Ellingboe, and M. M. Turner: Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas. In: Applied Physics Letters, 2006, 261502
2005T. Kampschulte, J. Schulze, T. Gans, U. Czarnetzki, S. Marke, and T. Wallendorf: Phase and space resolved optical emission spectroscopic investigations of an inductively coupled RF plasma using an imaging acousto-optic spectrometer. In: Surface and Coatings Technology, 2005, 859