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Current contact address
| Country | United States of America |
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| City | Lemont |
| Institution | Argonne National Laboratory |
| Institute | Energy Systems Division |
Profile
| Research fields | Experimental Condensed Matter Physics,Thermodynamics and Kinetics as well as Properties of Phases and Microstructure of Materials,Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering |
|---|---|
| Keywords | ALE, ALD, ALCVD, , CMOS Technology, Thin films, DRAM, Interconnects, High k-dielectric, , Pr2O3 (praseodymium oxide) |