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Current contact address
| Country | United States of America |
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| City | Gaithersburg |
| Institution | National Institute of Standards and Technology |
| Institute | Physical Measurement Laboratory (PML); Semiconductor and Dimensional Metrology Division (SDMD) |
Profile
| Research fields | Optics, Quantum Optics and Physics of Atoms, Molecules and Plasmas,Automation, Mechatronics, Control Systems, Intelligent Technical Systems, Robotics,Materials Engineering |
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| Keywords | through-focus scanning optical microscopy (TSOM), nanoscale 3D metrology, nanotechnology nanomanufacturing, optical microscope, high-throughput process control |