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Current contact address
| Country | People's Republic of China |
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| City | Shanghai |
| Institution | Fudan University |
| Institute | Department of Microelectronics |
Profile
| Research fields | Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering |
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| Keywords | integrated circuit processing and technology, nano-device, atomic layer deposition, Copper metallization, Interconnection, Low Dielectric Constant Materials |